Force-controlled high-precision polishing technology is a set of high-precision intelligent grinding system composed of industrial robots, six-dimensional force sensors and rigid grinding tools as the core, and then a collection of clamping fixtures, dust collection equipment and control systems. The principle of force control high-precision grinding technology is to detect the contact force between the grinding head and the workpiece through the six-dimensional force sensor, and decouple the collected force data for calculation and processing, and then transmit it to the robot controller, which combines the existing grinding trajectory and the received force data for calculation and processing, and then sends the robot recognizable feedback commands, so that the robot can grind and automatically carry out the compensation of force or displacement. The robot controller combines the existing grinding trajectory and the received force data, then calculates and processes them, and sends them to the robot to recognize the feedback instructions, so that the robot grinding automatically compensate for force or displacement.

Force-controlled high-precision polishing technology has the following characteristics:

      1. Human-like grinding perceptibility

The robotic arm can have grinding sensibility like a human being, and has the ability to automatically regulate the grinding force to ensure constant force grinding and achieve the same grinding effect on each surface.

      2. High-precision dimension grinding

It can meet the requirement of high precision of external dimensions.

      3. Strong product self-adaptation ability

Through VR vision or digital model import, the same type of product can have strong product adaptive ability.

It has been applied to the grinding of some high-precision parts in the automobile industry and the grinding of large vacuum chamber in the semiconductor industry.